¶ Error message
The temperature sensor of chamber temperature control is abnormal:
HMS_0300-9300-0001-0001: Chamber temperature is abnormal. The chamber heater's temperature sensor may have a short circuit.
¶ The cause of the error
The chamber temperature control module relies on four temperature sensors to provide temperature feedback. They are located at the heater, air outlet, air inlet, and power supply. This error code indicates whether there is a short circuit or open circuit problem with these temperature sensors.
¶ Solution
1. When the temperature sensors at heater, air outlet, and air inlet are abnormal, please cut off the power and check whether there is a short circuit or poor contact in the Chamber Heater Unit Temperature sensor shown in the figure. Please check it and reconnect it
2. When the power temperature sensor is abnormal, please cut off the power and check whether there is a short circuit or poor contact in the Power Supply Temperature sensor shown in the figure. Please check it and reconnect it.
If the error persists, the corresponding temperature sensor may be damaged, please contact support team for assistance.
¶ End Notes
We hope the detailed guide provided has been helpful and informative.
To ensure a safe and effective execution, if you have any concerns or questions about the process described in this article, we recommend submitting a Technical ticket regarding your issue. Please include a picture or video illustrating the problem, as well as any additional information related to your inquiry.